Used Cms Cnc Woodworking Machines for sale (77,258)

Condition: used, Year of construction: 1998, operating hours: 97,593 h, functionality: fully functional, turning diameter: 65 mm, spindle bore: 79 mm, spindle speed (max.): 4,500 rpm, spindle speed (min.): 25 rpm, For Sale: Gildemeister MF Sprint 65 CNC Sliding Headstock Lathe with 3-Meter Bar Feeder, as shown in the pictures. The machine was removed from our workshop in fully functional condition. A video of the machine in operation prior to disassembly is available upon request. Approximately five years ago, the linear guides of the X1 and Z1 slides (on the main spindle side) were replaced, including bearings and belts. A new HMI interface was installed recently. Detailed specifications and technical data can be found in the attached PDF. TECHNICAL DATA Control: Sinumerik 840C Bar Feeder: SIMAG 65.1-3200G, Year of Manufacture: 1998 Bar Length: 3 meters Bar Diameter / Spindle Bore: 65 mm Main Drive Power Output: 28 / 21 kW Speed Range: 25 – 4,500 rpm Torque: 320 / 240 Nm Maximum Feed Rate for Thread Cutting: 10 m/min C-Axis Speed: 120 rpm C-Axis Torque (Holding Torque): 180 Nm Tool Carrier Number of Tool Stations: 8 Shank Diameter (DIN 69880): 30 mm Number of Driven Tool Stations: 4 Power Output: 7.6 / 4.6 kW Torque: 24 / 14.7 Nm Maximum Speed of Tool Carrier 1: 4,000 rpm Maximum Speed of Tool Carrier 2: 4,000 rpm Slide 1 Cross Travel / Longitudinal Travel: 155 / 280 mm Rapid Traverse Speed X/Z: 22.5 / 22.5 m/min Feed Force X/Z: 900 / 900 daN Slide 2 Cross Travel / Longitudinal Travel: 82 / 120 mm Rapid Traverse Speed X/Z: 22.5 / 22.5 m/min Feed Force X/Z: 900 / 900 daN MACHINE DATA Dimensions with Bar Feeder and Chip Conveyor (L × W × H): approx. 6 × 2 × 2 meters Weight: approx. 6.5 tons Operating Voltage: 50 Hz, 400 V Accessories: Cooling System Chip Conveyor Documentation Hedpfswym Nfox Agtjfl The offer is subject to change and non-binding, changes and errors in the technical data or the equipment, as well as prior sale reserved Used machines are purchased as seen, without warranty claims. Delivery ex works excluding packaging and insurance, unless otherwise agreed. The price does not include statutory value added tax. As is usual with used machines, payment is made before loading.

Condition: ready for operation (used), Year of construction: 2005, functionality: fully functional, RANDEK REVOLVING CROSS CUT SAW Hedpfevryhgjx Agtefl

Condition: used, Technical Data Workpiece Dimensions - Length: 90 - 3,000 mm - Width: 70 - 1,000 mm Hedpfxezutrts Agtsfl - Thickness: 8 - 60 mm Working Ranges X-Axis - Vertical Drilling: 0 - 3,000 mm - Horizontal Drilling (X and Y): 0 - 3,000 mm - Through Milling: 0 - 2,500 mm - Partial Milling: 0 - 3,000 mm - Through Grooving with Saw (X-direction): 0 - 2,500 mm - Partial Grooving with Saw (X-direction): 0 - 3,000 mm Y-Axis - Vertical Drilling: 0 - 1,000 mm - Vertical Drilling with 32-mm System: 32 - 1,000 mm - Horizontal Drilling in X: 0 - 1,000 mm - Horizontal Drilling in Y-direction: 90 - 1,000 mm - Milling: 0 - 950 mm - Grooving with Saw (X-direction): 112 - 1,000 mm Z-Axis - Material Thickness: 0 - 60 mm Equipment The machine is equipped with 78 independent drilling spindles, distributed across two mirror-image processing units: - 39 spindles in the upper unit - 39 spindles in the lower unit Each processing unit includes: - 29 vertical drilling spindles (19 along the X-axis and 10 along the Y-axis, 32 mm spacing) - 8 horizontal drilling spindles along the X-axis (4 with dual outlets) - 2 independent horizontal drilling spindles in the X-direction - 2 independent horizontal drilling spindles in the Y-direction - 3.5 kW HSK electro-spindle - Spindle speed: 6,000 - 18,000 rpm Optional Equipment - Roller loading table - Upper and lower work tables (pressure tables) - Upper and lower processing units - Right-hand side strip unloading conveyor - Electronic thickness control - Central automatic lubrication - PC-based CNC control (Windows XP 600 with Soft CN) - Safety system

Condition: new, Year of construction: 2026, P5 Retrofit CNC milling center for 5-axis machining of thermoformed parts. Working area (cube dimensions): X-axis: 600 mm Y-axis: 800 mm Z-axis: 400 mm, with a fixture height of 120 mm. All specifications are based on a tool length of 60 mm from the front edge of the collet nut. Max. shank diameter: 10 mm (ER16 mini collet). Table design: 1 piece aluminum flat table, size: 600 x 800 mm, with threaded bushings. Vacuum supply: 1 piece vacuum clamping circuit on the table, vacuum distribution pipe with 3 x quick-release couplings NW 7.2, digital pressure monitor. 1 piece vacuum pump, suction capacity approx. 40 m³/h. Hfodpozzzrhefx Agtjl Milling spindle: 1 piece milling spindle (double spindle), air-cooled, 2 x ER16 mini collet chucks, power 2.5 kW, max. speed 27,000 1/min. Axis drives: Ball screw in the X / Y axis and Z axis; A / B axes with hollow shaft drives. Rapid traverse speeds X / Y axis => 45 m/min Z axis => 45 m/min Rotary / swivel axis => 12,000°/min. Acceleration (max.) => 2 m/sec² All axes are equipped with digital technology and absolute measuring systems. This eliminates the need for a reference run at the start of operation. Machine control: 1 piece BWO VEKTOR C Basic Plus Robot machine control. The complete unit is housed in an enclosure with a 15-inch capacitive touchscreen, which is mounted on the front of the machine. 64 MB NC memory USB interface Safety features: The machine is equipped with a robust sheet metal guard, with a separate access door for the rear of the machine; the guard is open at the top. 1 piece sliding door (manually operated), to demarcate the working area. Availability: The machine is operational and can be inspected immediately. Available from stock, delivery and installation can be arranged on short notice. Price on request, please request our offer.

Condition: used, machine/vehicle number: 008166, X axis working area: 4250 mm Y axis working area: 1250 mm Working Table: Pod and Rail Hsdpfsyy U S Iex Agtjfl Main Electrospindle power: 9 KW Number of controlled axes: 4 axes Total number of drilling spindles: 25 Total number of tool changer positions: 14

Condition: ready for operation (used), Year of construction: 1991, machine/vehicle number: 0 - 250 - 04 - 0558, Technical data : Hsdpjrwmwfsfx Agtofl X working area 2,500 mm Working area Y 800 mm Z working area 40 mm Number of milling spindles 2 Vertical drilling spindles 16 Drilling spindles in X axis 2 Drilling spindles in Y axis 1 Vacuum pump Machine table traverse table Weight approx. 3,500 kg CNC drilling and milling center WEEKE BP 10 , built in 1991. Panel area 5,200 x 1,500 mm. Machining area 2,500 x 800 mm, 16 vertical drilling stations, 1 keyway saw, 2 milling units, support plate handwheel and hydraulic unit. In 2016 he switched to Linux CNC 3D - new computer, new monitor, new software.

Condition: used, functionality: fully functional, Year of construction: 2008, No minimum price – guaranteed sale to the highest bidder! The machines are still assembled but disconnected from the power supply. An 11-ton forklift is available on-site for loading. For sale is a laser welding system manufactured by TRUMPF, model: TLC 1000P. Hodpfx Agjzy Ulletofl

Condition: used, Year of construction: 2019, Machine design: Throughfeed/Return feed Working area in X-direction: 1300 mm Working area in Y-direction: 5600 mm Working thickness (Z-dimension): 60 mm Number of main spindles: 1 Main spindle power: 5.5 kW Main spindle speed: 1000-20,000 rpm Clamping system: HSK-63 F Tool changer: Pick-up changer Tool change stations: 3 Back wall grooving units: fixed in Y-direction Vertical drilling spindles - in X-direction: 3 Vertical drilling spindles - in Y-direction: 10 Horizontal drilling spindle in X-direction: 2 Horizontal drilling spindle in Y-direction: 6 Control system: PC control Operating system: Windows Typewriter keyboard: Yes Mouse: Yes Programming system: Gannomat Editor DXF interface: Yes Online connection possible: Yes Table design: fixed, smooth table Central lubrication: automatic Hfodpfsymp N Tsx Agtel Tools: various tools Operating hours: 920 hours Weight approx.: 1800 kg Extraction diameter: 3x80 mm Machine was modernized in the factory; pressure bar and control technology from model 0572! Storage location: Customer

Condition: used, machine/vehicle number: 005521, X axis working area: 4000 mm Y axis working area: 1400 mm Working Table: Pod and Rail Main Electrospindle power: 15 KW Hsdpfovctlgex Agtjfl Number of controlled axes: 4 axes Total number of drilling spindles: 30 Total number of tool changer positions: 24

Condition: used, machine/vehicle number: 007350, X axis working area: 4000 mm Y axis working area: 1400 mm Working Table: Pod and Rail Hjdpsy Nkytjfx Agtsfl Main Electrospindle power: 15 KW Number of controlled axes: 4 axes Total number of drilling spindles: 30 Total number of tool changer positions: 28

Condition: like new (used), Year of construction: 2021, operating hours: 400 h, functionality: fully functional, machine/vehicle number: skyCNC 6008, travel distance X-axis: 900 mm, travel distance Y-axis: 6,100 mm, travel distance Z-axis: 270 mm, feed rate X-axis: 20 m/min, feed rate Y-axis: 15 m/min, feed rate Z-axis: 8 m/min, workpiece length (max.): 6,000 mm, workpiece width (max.): 800 mm, workpiece diameter (max.): 270 mm, table width: 800 mm, table load: 400 kg, overall weight: 3,250 kg, spindle speed (min.): 15,000 rpm, X 900 Y 6100 Z 270 mm 11 kW (800 table) Available for immediate delivery! PFEIFER technology skyCNC Milling Machine 6008 – 11 kW / 5 ATC (As good as new, from 2021, only 400 operating hours) CNC Milling Machine – High-precision and powerful milling and drilling with extremely high speed and quality A 6-meter CNC milling machine with automatic tool changer, in mint condition, is offered for sale on behalf of a customer. The machine is available for immediate delivery and ready for operation at the customer's premises; the sale is due to the conversion to laser processing. The machine can be inspected with power at the customer's/seller's premises in 07819 Triptis. Key data: - Working/travel area (LxWxH): 6100 mm x 900 mm x 270 mm (clearance height under gantry 300 mm, max. tool length 300 mm) - Automatic 5-station tool changing system with ISO40 tool holder (optional 10 tool changing stations possible); includes 5x ISO40-ER32-75 tool holders and 5x ER32 collets - HPM minimum quantity lubrication/spray cooling for cooling the workpiece and tool, automatically controlled by a solenoid valve via M-code - T-slot table 6000 mm x 800 mm - Includes 3 HOMGE HBV-8-300 pneumatic quick-action vises; jaw width 200 mm, clamping force up to 8.0 t – continuously adjustable; high clamping accuracy; Patented pneumatic system - Central lubrication access points - Automatic tool length measurement - Mobile MPG control unit for quick and easy machine control, freely selectable workpiece zero points - Ethernet connection for data transfer via network, USB port - File formats: G-code, DIN ISO data - Incl. industrial computer system with 17" TFT touchscreen, PC keyboard, and mouse - HF milling spindle: HSD spindle ES951 A 1112 S / 11 kW, air-cooled; spindle speed: 3,000 - 15,000 rpm - Power supply: 3-phase AC 400 V / 50 Hz, power consumption: max. 15 kW - Dimensions (L x W x H): 6850 x 1440 x 2163 mm, weight: approx. 3250 kg Hodpfx Ajwlqpyjgtsfl - Compressed air connection: min. 7 bar, including air filter required Sale to commercial customers only! Support and service provided by PFEIFER technology and Innovation Plauen

Condition: used, Year of construction: 2014, operating hours: 11,517 h, total height: 2,880 mm, total length: 10,000 mm, total width: 2,700 mm, Colour: White Empty weight: 6.000 kg - Year: 2014 - Documentation available: No - CE certificate present: No - Serial number: 070614/B/1-407 - Operating hours: 11517 - Number of milling spindles [pcs.]: 1 - └ Milling spindle 1: - - Number of controlled axes [pcs.]: 4 - - Main motor power [kW]: 10 - - C-axis present: Yes - Type milling table: Flat table - Drilling unit present: Yes - └ Motor power [kW]: 3.6 - └ Horizontal drill spindles [pcs.]: 6 - └ Vertical drilling spindles [pcs.]: 18 - Tool changer positions [pcs.]: 12 - System/software: TWINCAT - Safety feature: Safety mat, Enclosed fence - Vacuum pump present: Yes - └ Number [pcs.]: 2 - └ Brand: Becker - └ Year of manufacture: 2023 - └ Main motor power [kW]: 18.5 - └ Capacity [m³/h]: 600 - └ Vacuum pressure [bar]: 250 - └ Oil free: Yes Hfsdpfxjx E Uk Uo Agtol - CNC documentation available: USB stick - Table length [mm]: 5150 - Table width [mm]: 1600 - Working range X [mm]: 7220 - Working range Y [mm]: 1580 - Z-axis working range [mm]: 180 - Voltage [V]: 400 - Transport dimensions: 10000mm x 2700mm x 2880mm (l x w x h) - Transport weight [kg]: 6000kg Financial information VAT: The price shown is exclusive of VAT VAT/margin: VAT deductible for entrepreneurs Delivery and trade-in always possible for everything in the industrial sectors Yorick Diebels

Condition: used, Year of construction: 2012, CNC Machining Center Manufacturer: Weeke Type: PROFI BHP 210/56/22/R Year of Manufacture: 2012 Technical Data - Work table length: 5600 mm - Work table width: 2250 mm - Max. workpiece thickness: 135 mm Vector speed - X/Y: 105 m/min - Z: 20 m/min Special vacuum field arrangement - 5600x2250 - 3000x1525 - 2500x1250 - 1525x1525 2x Central vacuum frame for max. 3 pumps 6 Vacuum pumps 300/360 m3/h, 50 /60 Hz Automatic tool changer spindle - Tool holder: HSK63 - Tool retraction: automatic - Direction of rotation: right/left - Speed: 1250 - 24000 1/min, continuously programmable - Drive: frequency-controlled three-phase motor - Max. power at the tool: 7.5 - 12 kW (S1/S6 50%) - Spindle lubrication: grease, permanently lubricated - Cooling: liquid circulation cooling - Bearing: hybrid bearing (ceramic) Aggregate interface for main spindle, C-axis NC-controlled pressure ring Saw/drilling/milling aggregate - Spindle protrusion: 2-sided - Saw holder: mounting flange D=40 mm, pitch circle 52 mm - Saw blade diameter: max. 240 mm - Cutting depth: max. 85 mm - Drilling and milling holder: up to 16 mm shank diameter - Tool overhang: max. 85 mm - Speed: max. 14400 1/min Tool length control Power-pack incl. CE safety system - High-speed element for the X-axis traversing portal drive - Traversal speed of the two X drives at 100 m/min Note: Oscillating plate arrangement is omitted. Automatic tool changer magazine with 14 positions - moves along with the support in the X direction - Tool holder: HSK63 - Tool weight: max. 6 kg total weight incl. HSK holder - Tool diameter: max. 130 mm when fully occupied Max. 260 mm with smaller tool diameters or available space on the secondary positions - Tool change time: approx. 12-18 sec. Vertical drilling aggregate with 21 drilling spindles - Stroke in the Z direction: 60 mm - Drilling depth: max. 38 mm (with special drill bit up to 55 mm) - Direction of rotation: right/left - Speed: 1500 - 7500 1/min, frequency-controlled - Drive: 2.3 kW - Drill holder: d= 10 mm - Total drill length: 70 mm - Drill diameter: max. 35 mm - Spindle spacing: 32 mm Lift table 4000x2100 mm - Load capacity: 3500 kg - Height: 440 mm - Useful stroke: 600 mm - Stacking height: 480 mm - Motor: 2.2 kW, 3 x 400 Volt, 50 Hz - Pump: 8 l/min - Valve voltage: 24 Volt Hsdpfezy N Eysx Agtofl - Lifting speed: approx. 31 mm/sec. - Lowering speed: approx. 31 mm/sec. Belt conveyor 6000x 2250 mm Package processing Special functionality: 3 plates roughing 5600x2250x15 (3x18 mm) Infeed and outfeed, basic support plate on the machine table is taken into account Movable operating terminal Control system power control PC85 Software package with graphical operating programs Woodnest Complete Consisting of: Movable label terminal Software for external PC PICA - label printer Air conditioning system for cooling the control cabinet Note: The technical data and descriptions are copies of the original order confirmation. The information is for informational purposes only and is not binding.

Condition: as good as new (ex-display), Year of construction: 2026, max. workpiece length: unlimited max. workpiece width: 990 mm Panel thickness: 10 - 60 mm Drilling head: 20 spindles (12 vertical + 8 horizontal) Milling unit: 6-position tool changer Tool changer: 6-position tool changer Hsdpfoyl Tibsx Agtefl Units: 16-spindle drilling head Dimensions (LxWxH): 2200 mm x 1600 mm

Condition: used, machine/vehicle number: 007686, X axis working area: 3765 mm Y axis working area: 1560 mm Working Table: Flat table Main Electrospindle power: 13.2 KW Number of controlled axes: 3 axes Total number of drilling spindles: 18 Total number of tool changer positions: 12 Hjdpfx Agou Tliyjtofl

Condition: used, Year of construction: 2012, Professional heavy-duty CNC vertical milling machine Republic Lagun VBM 1000-F. Hfjdjz Ahq Hjpfx Agtel

Condition: used, Year of construction: 2014, Main spindle power: 13.2 kW Hfjdpfx Agszuwxdjtsl Drilling unit motor power: 7 kW 3-axis machine Drilling unit: Technical data - Nut saw - 2 horizontal drilling spindles in the X-axis (left/right) - 1 horizontal drilling spindle in the Y-axis (left/right) - 10 vertical drilling spindles

Year of construction: 1991, condition: ready for operation (used), Groove width range: 2mm-32mm, max. ram stroke: 300mm, stroke rate: 300 strokes/min, max. installation height: 450mm, feed: 0.01mm-0.15mm, working speed: 30m/min, return speed: 30m/min, machine dimensions X/Y/Z: approx. 2500mm/1500mm/2200mm, weight: approx. 2200kg, control: fk electronic Dialog CNC. On-site inspection is possible. Hfjdpfju D Aagex Agtol

Condition: used, CNC Turning and Machining Cente: Hfedpfozwn Sgex Agtsl Gildemeister/DMG Mori CTX2500/700 Year: 2019 Serial No.: 02620000651 2 driven spindles, rated speed 4,000/5,000 rpm, net weight 6,360 kg, accumulated operating hours 44,087 h, spindle hours: 27,832 h, cooling unit, chip conveyor, coolant treatment system, control system model: Ergoline, tool turret, 14 positions, for driven tools

Condition: used, machine/vehicle number: 008497, X axis working area: 3140 mm Y axis working area: 1560 mm Hfodpozruy Hofx Agtel Working Table: Flat table Number of controlled axes: 3 axes Total number of tool changer positions: 16

Year of construction: 1990, condition: ready for operation (used), A CNC universal milling and drilling center SHW is available. Travel X/Y/Z: 6000mm/2100mm/1500mm, milling head swivel: 180°, rapid traverse X/Y/Z: 8m/min, speed: 4500rpm, spindle power: 31.5kW, machine dimensions X/Y/Z: approx. 11000mm/9000mm/6000mm, weight: approx. 44000kg. Documentation available. On-site inspection is possible. Hfodpfx Agjuh Azietsl

Condition: used, machine/vehicle number: 008389, X axis working area: 8417 mm Y axis working area: 1930 mm Working Table: Pod and Rail Main Electrospindle power: 13.2 KW Number of controlled axes: 4 axes Hjdjyqxxrspfx Agtjfl Maximum edge height: 60 mm Total number of drilling spindles: 39 Total number of tool changer positions: 22

Condition: ready for operation (used), Year of construction: 1996, Immediately available ex location: CNC universal milling machine Reckermann Type: Primo II Year of manufacture: 1996 Heidenhain TNC 430 control Spindle taper SK 50 Infinitely variable spindle speeds: 20 – 2,000 rpm Table load capacity: 1,000 kg Stepless feed rates: 20 – 6,000 mm/min Travel (X / Y / Z): 1,000 / 400 / 350 mm Drive: 7.5 kW Weight: 4 t Price: EUR 2,500 plus VAT, ex location Hfedpfezwudvjx Agtsl

Condition: used, CNC Gantry-Type Boring and Milling Machine ANAYAK Type HVM-3800-P Bed type milling machine, structure similar to a plate-type boring mill with fixed table Machine No.: M-20021203 Year of manufacture: 2002 ("Refurbished 2025") The machine will be completely workshop overhauled in 2025 and can then be inspected in storage at 37235 Hessisch Lichtenau. Travel distances: X: 3,200 mm, Y: 1,200 mm, Z: 1,500 mm Table size: 3,800 x 1,200 mm T-slots: 8 pieces, 22 mm, spacing 130 mm Table load: max. 25 tons (stationary table – virtually unlimited load capacity) Spindle taper: ISO 50 (DIN69871-A) (drawbar: DIN 69872-B) Spindle speed: 60 – 4,000 rpm, stepless Feed rate: up to 10,000 mm/min, stepless Rapid traverse X + Y: 20 m/min Rapid traverse Z: 10 m/min Spindle drive: 22 / 30 kW Electrical connection: 400 Volt, 50 Hz, 50 kVA - Automatic tool changer for 30 tools - Spindle drive with 2 speed ranges - With automatic tool changer and tool magazine - Orthogonal milling head with hydro-mechanical tool clamping - Orthogonal milling head fully automatic swiveling in two 45° planes – B+C axis - HEIDENHAIN iTNC 530 control, with electronic handwheel - Prepared for wireless touch probe (probe and receiver not included) - Additional HF-spindle, 18,000 rpm – for attachment - Free-standing control cabinet - Chip conveyor positioned between the gantry bed and the machine table - 32,078 operating hours recorded - Coolant system - Free-standing hydraulic unit - Operating manual with circuit diagrams Installation area (L x W): approx. 1,000 x 700 cm Installation height: approx. 410 cm Weight (total): approx. 33 tons Hfjdpjxcgtgjfx Agtsl Good condition

Condition: used, Machining area: - in the X direction without gluing 6000 mm - in the X direction with gluing 5000 mm - in the Y direction 1200 mm - in the Y direction with main spindle + center distance 20 mm 1300 mm max. workpiece height above - top edge of suction plate Z1 100 mm - max. workpiece thickness Z2, dependent on equipment/application Work table height: approx. 950 mm 1 main spindle with pneumatic feed stroke - drive power: 12 kW in S-1 operation - tool holder: HSK F63, taper diameter = 38 mm - tool change: automatic - change force: 11000 N - tool weight: max. 6 kg - direction of rotation: clockwise/counterclockwise, programmable - speed range: continuously variable 1500 - 24000 rpm, programmable - drive: frequency-controlled three-phase motor - spindle lubrication: single grease lubrication - spindle cooling: water cooling 1 CNC axis rotating 360 degrees 1 vertical drilling unit S21 Machine table consists of: - 6 support arms adjustable in the X direction, each with a rear and center stop, all stops controlled by the program - 6 sets of suction plates consisting of a total of - 6 suction plates 114 x 159 x 100 mm - 6 suction plates 125 x 75 x 100 mm - The support arms and suction plates can be individually positioned according to the corresponding workpiece size. Changeover area: - without pendulum machining, without gluing: X = 2 x 2900 mm - free space in the middle: X = 200 mm - without pendulum machining, with gluing: X = 2 x 2150 mm - free space in the middle: X = 700 mm - with pendulum machining, without gluing: X = 2 x 2400 mm - free space in the middle: X = 1200 mm - with pendulum machining, with gluing: X = 2 x 1700 mm - free space in the middle: X = 1600 mm Feed drive system Rapid traverse rates: Hfodozupibspfx Agtsl - X-axis 100 m/min - Z-axis 25 m/min Air pressure: 6 bar Tool changer magazine with 18 positions Tool coding: position-coded Tool weight: max. 6 kg Tool length: max. 150 mm Tool diameter: max. 100 mm when fully loaded max. 150 mm with free adjacent positions or nesting Central connection for extraction Mains voltage: 3/N/PE, 400/230 V, 50 Hz 1 vacuum pump 100 m3/h