Dry vacuum pump

ULVAC Model LR600

Here we offer a ULVAC dry vacuum pump.
ULVAC Dry Vacuum Pump
Solution for rough process pumps
Dry vacuum pump
ULVAC's unique approach to using latent heat in the
pump body allows the LR / HR / UR series,
performance even in the most stringent processes.
ULVAC has continued its design efforts to maintain
extremely uniform high temperature over all pump stages.
and this pump family is optimized for CVD and etching applications.
Compatible with ULVAC's ECO-SHOCK system for additional energy savings
Properties
The LR-Series pump is designed for charging valve chambers and PVD processes.
ULVAC's unique aluminium design allows for very uniform temperature distribution throughout the pump body:
The ULVAC LR-Series pump is designed for applications that require a heated pump, heated gas lines and/or heated exhaust pipes
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Excellent helium pumping capacity
Canning motor for safety and ease of maintenance
Withstands power interruptions of up to 500 ms.
Internal components are specially treated to ensure a high level of surface hardness and excellent corrosion resistance.
This prevents the wear of internal pump parts when these corrosive gases are exposed.
(Series LR)
Designed for process gases that produce powdered by-products, such as Si crystal growth furnaces
Pre-pump for

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